Carrier for thin glass substrates and use thereof

Support pour substrats de verre minces et utilisation de celui-ci


La présente invention concerne un support pour soutenir un substrat de verre à grande surface ayant une aire d'au moins 0,174 m² dans une chambre de traitement de substrat. Le support comprend au moins un élément de fixation conçu pour maintenir le substrat au niveau du côté supérieur du substrat et conçu pour porter au moins 60 % du poids du substrat pendant le traitement du substrat, et au moins une partie support conçue pour maintenir le substrat dans une orientation sensiblement verticale pendant le traitement du substrat.
A carrier for supporting a large area glass substrate having an area of at least 0.174 m² in a substrate processing chamber is described. The carrier includes at least one fixation element configured to hold the substrate at the substrate's upper side and configured to carry at least 60% of the substrate's weight during processing of the substrate, and at least one support portion adapted to hold the substrate at an essentially vertical orientation during processing of the substrate.




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    CN-105083980-ANovember 25, 2015合肥京东方光电科技有限公司, 京东方科技集团股份有限公司Sputtering equipment and baseplate bearing device thereof
    CN-105083980-BDecember 01, 2017合肥京东方光电科技有限公司, 京东方科技集团股份有限公司溅射设备及其基板承载装置
    CN-105452524-AMarch 30, 2016应用材料公司Holding arrangement for substrates
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