Carrier for thin glass substrates and use thereof

Support pour substrats de verre minces et utilisation de celui-ci

Abstract

La présente invention concerne un support pour soutenir un substrat de verre à grande surface ayant une aire d'au moins 0,174 m² dans une chambre de traitement de substrat. Le support comprend au moins un élément de fixation conçu pour maintenir le substrat au niveau du côté supérieur du substrat et conçu pour porter au moins 60 % du poids du substrat pendant le traitement du substrat, et au moins une partie support conçue pour maintenir le substrat dans une orientation sensiblement verticale pendant le traitement du substrat.
A carrier for supporting a large area glass substrate having an area of at least 0.174 m² in a substrate processing chamber is described. The carrier includes at least one fixation element configured to hold the substrate at the substrate's upper side and configured to carry at least 60% of the substrate's weight during processing of the substrate, and at least one support portion adapted to hold the substrate at an essentially vertical orientation during processing of the substrate.

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Patent Citations (4)

    Publication numberPublication dateAssigneeTitle
    DE-102004027898-A1January 05, 2006Leybold Optics GmbhTransport unit for display screens, e.g. for mobile phones or DVD players, supports display in hanging position between fixed strip and smooth cylinder which is pressed against it by wedge-shaped jaws
    JP-2000336476-ADecember 05, 2000Fujitsu Ltd, 富士通株式会社Method for sputtering glass substrate and sputtering system
    KR-20090110863-AOctober 22, 2009윌라드 앤드 켈시 솔라 그룹, 엘엘씨유리 시트 반도체 코팅을 위한 시스템과 방법
    US-2011020978-A1January 27, 2011Stion CorporationSodium doping method and system of cigs based materials using large scale batch processing

NO-Patent Citations (1)

    Title
    None

Cited By (11)

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    CN-105083980-ANovember 25, 2015合肥京东方光电科技有限公司, 京东方科技集团股份有限公司Sputtering equipment and baseplate bearing device thereof
    CN-105083980-BDecember 01, 2017合肥京东方光电科技有限公司, 京东方科技集团股份有限公司溅射设备及其基板承载装置
    CN-105452524-AMarch 30, 2016应用材料公司Holding arrangement for substrates
    EP-3008224-A4March 01, 2017View IncGlass pallet for sputtering systems
    US-9340443-B2May 17, 2016Corning IncorporatedBulk annealing of glass sheets
    WO-2015014410-A1February 05, 2015Applied Materials, Inc.Agencement de support destinés à des substrats
    WO-2015014411-A1February 05, 2015Applied Materials, Inc.Agencement de support pour substrats
    WO-2015158390-A1October 22, 2015Applied Materials, Inc.Support pour substrats
    WO-2015180798-A1December 03, 2015Applied Materials, Inc.Support et procédé pour supporter un substrat dans une chambre de traitement sous vide
    WO-2016180449-A1November 17, 2016Applied Materials, Inc.Procédé et supports de maintien de substrats
    WO-2017139495-A1August 17, 2017Entegris, Inc.Microenvironment for flexible substrates